Nanolithography and Micro-patterning Methods
Research within this cluster concentrates on advanced lithography techniques for creating micro and nanoscale patterns. It plays a crucial role in the fabrication of electronic components and devices, emphasizing precision and resolution.
48,094 papers
Parent topic: Nanoelectronics and Sensor Technologies
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Papers Over Time
Top Papers
1998 · 4,432 citations
2000 · 2,999 citations
1998 · 2,800 citations
1999 · 2,756 citations
1995 · 2,391 citations
1996 · 1,953 citations
2010 · 1,923 citations
1997 · 1,741 citations
2007 · 1,556 citations
2003 · 1,553 citations
2004 · 1,391 citations
1993 · 1,388 citations
2018 · 1,323 citations
2001 · 1,228 citations
2013 · 1,156 citations
2008 · 1,085 citations
1999 · 1,052 citations
2009 · 1,012 citations
1997 · 972 citations
2004 · 912 citations