Sub-10 Nm Imprint Lithography And Applications

·1997·DOI

Engineering and Technology

Optical Science and Technology

Advanced Electromagnetic Wave Technologies

Nanolithography and Micro-patterning Methods

Role in the Field

Neutralin Engineering and Technology

Neutralin Optical Science and Technology

Neutralin Advanced Electromagnetic Wave Technologies

Neutralin Nanolithography and Micro-patterning Methods

Abstract

Citations

972

Year

1997

PageRank

4.3 / 10

Relative influence (log-scaled)