Imprint Of Sub‐25 Nm Vias And Trenches In Polymers

·1995·DOI

Engineering and Technology

Optical Science and Technology

Advanced Electronic Packaging Technologies

Nanolithography and Micro-patterning Methods

Role in the Field

Neutralin Engineering and Technology

Neutralin Optical Science and Technology

Neutralin Advanced Electronic Packaging Technologies

Neutralin Nanolithography and Micro-patterning Methods

Abstract

Citations

2,391

Year

1995

PageRank

4.9 / 10

Relative influence (log-scaled)