Mask Design For Optical Microlithography—An Inverse Imaging Problem

·2007·DOI

Engineering and Technology

Optical Science and Technology

Advanced Optical Imaging and Processing

Precision Manufacturing Metrology

Role in the Field

Neutralin Engineering and Technology

Neutralin Optical Science and Technology

Neutralin Advanced Optical Imaging and Processing

Neutralin Precision Manufacturing Metrology

Abstract

Citations

165

Year

2007

PageRank

2.2 / 10

Relative influence (log-scaled)

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