Position Control In Lithographic Equipment [Applications Of Control]

·2011·DOI
Engineering and Technology
Communication and Signal Processing
Intelligent Control Systems
Precision Manufacturing Metrology

Role in the Field

Neutralin Engineering and Technology
Neutralin Communication and Signal Processing
Neutralin Intelligent Control Systems
Neutralin Precision Manufacturing Metrology

Abstract

Citations

326

Year

2011

PageRank

2.6 / 10

Relative influence (log-scaled)

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