Impact Ionization, Trap Creation, Degradation, And Breakdown In Silicon Dioxide Films On Silicon

·1993·DOI

Engineering and Technology

Materials Science and Physics

Vacuum Science and Technology

Ion Beam Effects and Applications

Role in the Field

Neutralin Engineering and Technology

Neutralin Materials Science and Physics

Neutralin Vacuum Science and Technology

Neutralin Ion Beam Effects and Applications

Abstract

Citations

656

Year

1993

PageRank

4.1 / 10

Relative influence (log-scaled)

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