Plasma Source Ion‐Implantation Technique For Surface Modification Of Materials

·1987·DOI

Engineering and Technology

Chemical and Material Sciences

Plasma and Pulsed Power Technologies

Ion Beam Effects and Applications

Role in the Field

Neutralin Engineering and Technology

Neutralin Chemical and Material Sciences

Neutralin Plasma and Pulsed Power Technologies

Neutralin Ion Beam Effects and Applications

Abstract

Citations

1,033

Year

1987

PageRank

4.4 / 10

Relative influence (log-scaled)

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