Fabrication Of SU-8 Multilayer Microstructures Based On Successive CMOS Compatible Adhesive Bonding And Releasing Steps

·2005·DOI
Engineering and Technology
Optical Science and Technology
Nanoelectronics and Sensor Technologies
Polymer Microfabrication Techniques

Role in the Field

Neutralin Engineering and Technology
Neutralin Optical Science and Technology
Neutralin Nanoelectronics and Sensor Technologies
Neutralin Polymer Microfabrication Techniques

Abstract

Citations

123

Year

2005

PageRank

2.2 / 10

Relative influence (log-scaled)

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