Automated Precision Measurement Of Surface Profile In CAD-directed Inspection

·1992·DOI

Engineering and Technology

Communication and Signal Processing

Computer-Aided Design and Engineering

Precision Manufacturing Metrology

Role in the Field

Neutralin Engineering and Technology

Neutralin Communication and Signal Processing

Neutralin Computer-Aided Design and Engineering

Neutralin Precision Manufacturing Metrology

Abstract

Citations

157

Year

1992

PageRank

3.1 / 10

Relative influence (log-scaled)

Related Papers

11 of 11 papers

On-machine And In-Process Surface Metrology For Precision Manufacturing

·2019·315 citations

Geometrical Metrology For Metal Additive Manufacturing

·2019·215 citations

Position Control In Lithographic Equipment [Applications Of Control]

·2011·326 citations

Computer Control Of Microscopes Using µManager

·2010·1,487 citations

Surface Integrity In Machining

·2010·207 citations

Cavity Cooling Of A Microlever

·2004·587 citations

Probing Systems In Dimensional Metrology

·2004·273 citations

Automated Laser Scanning System For Reverse Engineering And Inspection

·2002·244 citations

Stiction In Surface Micromachining

·1996·460 citations

Chemical Amplification Mechanisms For Microlithography

·1991·183 citations

Subsurface Flaw Detection In Metals By Photoacoustic Microscopya

·1980·179 citations