Theory Of Sputtering. I. Sputtering Yield Of Amorphous And Polycrystalline Targets

·1969·DOI

Engineering and Technology

Materials Science and Physics

Plasma and Pulsed Power Technologies

Thin-Film Technology and Applications

Role in the Field

Neutralin Engineering and Technology

Neutralin Materials Science and Physics

Neutralin Plasma and Pulsed Power Technologies

Neutralin Thin-Film Technology and Applications

Abstract

Citations

3,367

Year

1969

PageRank

5.4 / 10

Relative influence (log-scaled)

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