Theory Of Sputtering. I. Sputtering Yield Of Amorphous And Polycrystalline Targets
Role in the Field
Neutralin Engineering and Technology
Neutralin Materials Science and Physics
Neutralin Plasma and Pulsed Power Technologies
Neutralin Thin-Film Technology and Applications
Abstract
Citations
3,367
Year
1969
PageRank
5.4 / 10
Relative influence (log-scaled)