The Evolution Of Silicon Wafer Cleaning Technology

·1990·DOI

Engineering and Technology

Communication and Signal Processing

Vacuum Science and Technology

Silicon-Based Nanostructures

Role in the Field

Neutralin Engineering and Technology

Neutralin Communication and Signal Processing

Neutralin Vacuum Science and Technology

Neutralin Silicon-Based Nanostructures

Abstract

Citations

1,400

Year

1990

PageRank

3.9 / 10

Relative influence (log-scaled)