Monte Carlo Simulation Of The Thermalization Of Sputtered Atoms And Reflected Atoms In The Magnetron Sputtering Discharge

·1995·DOI

Engineering and Technology

Materials Science and Physics

Cosmic Phenomena and Particle Interactions

Detection Technologies for Charged Particles

Role in the Field

Neutralin Engineering and Technology

Neutralin Materials Science and Physics

Neutralin Cosmic Phenomena and Particle Interactions

Neutralin Detection Technologies for Charged Particles

Abstract

Citations

96

Year

1995

PageRank

1.9 / 10

Relative influence (log-scaled)

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