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  3. Metal-Assisted Chemical Etching Of Silicon: A Review

Metal-Assisted Chemical Etching Of Silicon: A Review

·2010·DOI
Engineering and Technology
Chemical and Material Sciences
Advanced Semiconductor Devices
Silicon-Based Nanostructures

Role in the Field

Neutralin Engineering and Technology
Neutralin Chemical and Material Sciences
Neutralin Advanced Semiconductor Devices
Neutralin Silicon-Based Nanostructures

Abstract

Citations

1,681

Year

2010

PageRank

3.5 / 10

Relative influence (log-scaled)

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