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  3. Influence Of Apparatus Geometry And Deposition Conditions On The Structure And Topography Of Thick Sputtered Coatings

Influence Of Apparatus Geometry And Deposition Conditions On The Structure And Topography Of Thick Sputtered Coatings

·1974·DOI
Engineering and Technology
Materials Science and Physics
Vacuum Science and Technology
Coating Techniques for Protection

Role in the Field

Neutralin Engineering and Technology
Neutralin Materials Science and Physics
Neutralin Vacuum Science and Technology
Neutralin Coating Techniques for Protection

Abstract

Citations

2,016

Year

1974

PageRank

4.8 / 10

Relative influence (log-scaled)

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