Influence Of Apparatus Geometry And Deposition Conditions On The Structure And Topography Of Thick Sputtered Coatings

·1974·DOI

Engineering and Technology

Materials Science and Physics

Vacuum Science and Technology

Coating Techniques for Protection

Role in the Field

Neutralin Engineering and Technology

Neutralin Materials Science and Physics

Neutralin Vacuum Science and Technology

Neutralin Coating Techniques for Protection

Abstract

Citations

2,016

Year

1974

PageRank

4.8 / 10

Relative influence (log-scaled)

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