Electron Beam Lithography: Resolution Limits And Applications

·2000·DOI

Engineering and Technology

Optical Science and Technology

Advanced Semiconductor Devices

Electron Transport Phenomena

Role in the Field

Neutralin Engineering and Technology

Neutralin Optical Science and Technology

Neutralin Advanced Semiconductor Devices

Neutralin Electron Transport Phenomena

Abstract

Citations

878

Year

2000

PageRank

3.3 / 10

Relative influence (log-scaled)