Atomic Layer Deposition: An Overview

·2009·DOI

Engineering and Technology

Materials Science and Physics

Vacuum Science and Technology

Thin-Film Technology and Applications

Role in the Field

Neutralin Engineering and Technology

Neutralin Materials Science and Physics

Neutralin Vacuum Science and Technology

Neutralin Thin-Film Technology and Applications

Abstract

Citations

4,845

Year

2009

PageRank

4.3 / 10

Relative influence (log-scaled)