A System For Determining The Mass And Energy Of Particles Incident On A Substrate In A Planar Diode Sputtering System

·1970·DOI
Engineering and Technology
Materials Science and Physics
Plasma and Pulsed Power Technologies
Detection Technologies for Charged Particles

Role in the Field

Neutralin Engineering and Technology
Neutralin Materials Science and Physics
Neutralin Plasma and Pulsed Power Technologies
Neutralin Detection Technologies for Charged Particles

Abstract

Citations

110

Year

1970

PageRank

3.0 / 10

Relative influence (log-scaled)

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