A Closed-Form Solution For Schedulability And Optimal Scheduling Of Dual-Arm Cluster Tools With Wafer Residency Time Constraint Based On Steady Schedule Analysis

·2010·DOI
Engineering and Technology
Communication and Signal Processing
Innovative Energy and Technology Solutions
Energy Management in Manufacturing

Role in the Field

Neutralin Engineering and Technology
Neutralin Communication and Signal Processing
Neutralin Innovative Energy and Technology Solutions
Neutralin Energy Management in Manufacturing

Abstract

Citations

154

Year

2010

PageRank

1.8 / 10

Relative influence (log-scaled)

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